Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 6
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High resolution patterning on nonplanar substrates with large height variation using electron beam lithography
Ray, Vishva, Aida, Yukinori, Funakoshi, Ryo, Kato, Hitoshi, Pang, Stella W.Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4755819
File:
PDF, 2.66 MB
english, 2012