Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2013 Vol. 31; Iss. 4
Focused ion beam induced Ga-contamination—An obstacle for UV-nanoimprint stamp repair?
Waid, Simon, Wanzenboeck, Heinz D., Gavagnin, Marco, Langegger, Ruppert, Muehlberger, Michael, Bertagnolli, EmmerichVolume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4813025
File:
PDF, 4.38 MB
english, 2013