Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2013 Vol. 31; Iss. 6
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Phase defect characterization on an extreme-ultraviolet blank mask using microcoherent extreme-ultraviolet scatterometry microscope
Harada, Tetsuo, Tanaka, Yusuke, Watanabe, Takeo, Kinoshita, Hiroo, Usui, Youichi, Amano, TsuyoshiVolume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4826249
File:
PDF, 2.45 MB
english, 2013