Fabrication and characterization of aluminum-molybdenum...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2014 / 09 Vol. 32; Iss. 5

Fabrication and characterization of aluminum-molybdenum nanocomposite membranes

van den Hurk, Remko, Nelson-Fitzpatrick, Nathan, Evoy, Stephane
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4893671
Date:
September, 2014
File:
PDF, 1.06 MB
english, 2014
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