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SPIE Proceedings [SPIE MOEMS-MEMS 2006 Micro and Nanofabrication - San Jose, CA (Saturday 21 January 2006)] MOEMS Display, Imaging, and Miniaturized Microsystems IV - Highly reflective optical coatings for high-power applications of micro scanning mirrors in the UV-VIS-NIR spectral region
Sandner, Thilo, Schmidt, Jan U., Schenk, Harald, Lakner, Hubert, Yang, Minghong, Gatto, Alexandre, Kaiser, Norbert, Braun, Stefan, Foltyn, Thomas, Leson, Andreas, Ürey, Hakan, Dickensheets, David L.,Volume:
6114
Year:
2006
DOI:
10.1117/12.644626
File:
PDF, 974 KB
2006