[ACM Press the 31st conference - Phoenix, Arizona, United States (1999.12.05-1999.12.08)] Proceedings of the 31st conference on Winter simulation Simulation---a bridge to the future - WSC '99 - Evaluation of cluster tool throughput for thin film head production
Koehler, Eric J., Wulf, Timbur M., Bruska, Alvin C., Seppanen, Marvin S.Volume:
1
Year:
1999
Language:
english
DOI:
10.1145/324138.324465
File:
PDF, 82 KB
english, 1999