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Composition and chemical structure characteristics of CNx layers prepared by different plasma assisted techniques
T Ujvári, A Tóth, M Mohai, J Szépvölgyi, I BertótiVolume:
141-142
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0167-2738(01)00722-6
File:
PDF, 158 KB
english, 2001