Fabrication of 3C-SiC MOS Capacitors Using High-Temperature...

Materials Science Forum 2015 / 6 Vol. 821-823

Fabrication of 3C-SiC MOS Capacitors Using High-Temperature Oxidation

Sharma, Yogesh K., Li, Fan, Fisher, C.A., Jennings, M.R., Hamilton, Dean, Thomas, S.M., Pérez-Tomás, A., Mawby, P.A.
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Volume:
821-823
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.821-823.464
Date:
June, 2015
File:
PDF, 2.39 MB
english, 2015
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