Structure of the velocity distribution of...

Plasma Sources Science and Technology 2015 / 10 Vol. 24; Iss. 5

Structure of the velocity distribution of sheath-accelerated secondary electrons in an asymmetric RF-dc discharge

Khrabrov, Alexander V, Kaganovich, Igor D, Ventzek, Peter L G, Ranjan, Alok, Chen, Lee
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Volume:
24
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/24/5/054003
Date:
October, 2015
File:
PDF, 3.51 MB
english, 2015
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