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Full field imprint masks using variable shape beam pattern generators
K. Selinidis, E. Thompson, G. Schmid, N. Stacey, J. Perez, J. Maltabes, S. V. Sreenivasan, D. J. Resnick, A. Fujii, Y. Sakai, S. Sasaki, N. HayashiYear:
2008
Language:
english
DOI:
10.1116/1.2976573
File:
PDF, 2.53 MB
english, 2008