Damage mechanism in low-dielectric (low-k) films during...

  • Main
  • Damage mechanism in low-dielectric...

Damage mechanism in low-dielectric (low-k) films during plasma processes

B. Jinnai, T. Nozawa, S. Samukawa
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2008
Language:
english
DOI:
10.1116/1.3010721
File:
PDF, 1.21 MB
english, 2008
Conversion to is in progress
Conversion to is failed