Self-aligned patterning on a flexible substrate using a...

  • Main
  • Self-aligned patterning on a flexible...

Self-aligned patterning on a flexible substrate using a dual-tone, thermally activated photoresist

W. K. Jen, B. M. Rawlings, J. R. Strahan, D. J. Hellebusch, W. J. Durand, C. Grant Willson
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
2012
Language:
english
DOI:
10.1116/1.3669380
File:
PDF, 1.75 MB
english, 2012
Conversion to is in progress
Conversion to is failed