Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 6
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Fabrication of digital planar holograms into high refractive index waveguide core for spectroscopy-on-chip applications
Calò, Cosimo, Lacatena, Valeria, Dhuey, Scott D., Cabrini, Stefano, Babin, Sergey, Peroz, Christophe, Koshelev, Alexander, Ivonin, Igor, Goltsov, Alexander, Yankov, VladimirVolume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4750038
File:
PDF, 959 KB
english, 2012