Voltage induced acoustic resonance in metal organic...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2012 Vol. 30; Iss. 6

Voltage induced acoustic resonance in metal organic chemical vapor deposition SrTiO3 thin film

Sbrockey, Nick M., Tompa, Gary S., Kalkur, Thottam S., Zhang, Jialan, Alpay, S. Pamir, Cole, Melanie W.
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4757129
File:
PDF, 1.19 MB
english, 2012
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