SPIE Proceedings [SPIE Electronic Imaging 2003 - Santa Clara, CA (Monday 20 January 2003)] Poly-Silicon Thin Film Transistor Technology and Applications in Displays and Other Novel Technology Areas - Low-temperature processing of SiO2 thin films by HD-PECVD technique for gate dielectric applications
Joshi, Pooran C., Moriguchi, M., Crowder, Mark A., Droes, Steven R. T., Flores, James S., Voutsas, Apostolos T., Hartzell, John W., Voutsas, Apostolos T.Volume:
5004
Year:
2003
Language:
english
DOI:
10.1117/12.482597
File:
PDF, 162 KB
english, 2003