Preparation of Silicon-on-Insulator Substrate on Large...

Japanese Journal of Applied Physics 2003 / 4 Vol. 42; Iss. Part 1, No

Preparation of Silicon-on-Insulator Substrate on Large Free-Standing Carbon Nanotube Film Formation by Surface Decomposition of SiC Film

Nagano, Takayuki, Ishikawa, Yukari, Shibata, Noriyoshi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.1717
Date:
April, 2003
File:
PDF, 257 KB
english, 2003
Conversion to is in progress
Conversion to is failed