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Passivation of GaAs by atomic hydrogen flow produced by the crossed beams method
Balmashnov, A A, Golovanivsky, K S, Omeljanovsky, E M, Pakhomov, A V, Polyakov, A YVolume:
5
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/5/3/010
Date:
March, 1990
File:
PDF, 338 KB
english, 1990