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[IEEE 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) - Hapuna Beach, HI, USA (2015.3.23-2015.3.26)] 2015 IEEE International Symposium on Inertial Sensors and Systems (ISISS) Proceedings - A wafer level vacuum packaged silicon vibration beam accelerometer
Xia, Guo-ming, Qiu, An-ping, Shi, Qin, Su, YanYear:
2015
Language:
english
DOI:
10.1109/ISISS.2015.7102378
File:
PDF, 1.18 MB
english, 2015