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[IEEE TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference - Anchorage, AK, USA (2015.6.21-2015.6.25)] 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - Modeling the effect of anchor geometry on the quality factor of bulk mode resonators
Gerrard, Dustin D., Ng, Eldwin J., Ahn, Chae H., Hong, Vu A., Yang, Yushi, Kenny, Thomas W.Year:
2015
Language:
english
DOI:
10.1109/TRANSDUCERS.2015.7181346
File:
PDF, 1.34 MB
english, 2015