Fabrication of parallel-plate nanomirror arrays for extreme...

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Fabrication of parallel-plate nanomirror arrays for extreme ultraviolet maskless lithography

Y. Shroff, Y. Chen, W. Oldham
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Year:
2001
Language:
english
DOI:
10.1116/1.1417544
File:
PDF, 847 KB
english, 2001
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