End point of silicon milling using an optical beam induced...

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End point of silicon milling using an optical beam induced current signal for controlled access to integrated circuits for backside circuit editing

N. Antoniou, N. J. Bassom, C. Huynh, D. Monforte, J. D. Casey, A. Krechmer, P. Carleson
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Year:
2002
Language:
english
DOI:
10.1116/1.1526665
File:
PDF, 761 KB
english, 2002
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