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Virtual interface approximation model applied to spectroscopic ellipsometry for on-line composition determination of metalorganic chemical vapor deposition grown ternary nitrides
A. Bonanni, K. Schmidegg, A. Montaigne-ramil, H. Sitter, K. Hingerl, D. StifterYear:
2003
Language:
english
DOI:
10.1116/1.1585078
File:
PDF, 416 KB
english, 2003