Chemical mapping of polymer photoresists by scanning transmission x-ray microscopy
L. Muntean, R. Planques, A. L. D. Kilcoyne, S. R. Leone, M. K. Gilles, W. D. HinsbergYear:
2005
Language:
english
DOI:
10.1116/1.1978899
File:
PDF, 644 KB
english, 2005