Evaluation of fluorine additive effect on cationic UV-nanoimprint resin
M. Okada, Y. Haruyama, S. Matsui, H. Miyake, S. Iyoshi, T. Yukawa, H. TakeuchiYear:
2011
Language:
english
DOI:
10.1116/1.3653513
File:
PDF, 1.15 MB
english, 2011