Parallel electron-beam-induced deposition using a...

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Parallel electron-beam-induced deposition using a multi-beam scanning electron microscope

P. C. Post, A. Mohammadi-gheidari, C. W. Hagen, P. Kruit
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Year:
2011
Language:
english
DOI:
10.1116/1.3656027
File:
PDF, 1.72 MB
english, 2011
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