Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 6
Control of inclination angle of glass-like carbon mold by defocus UV exposure on Si-containing photoresist
Mekaru, Harutaka, Okuyama, Chieko, Ueno, AkihisaVolume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4766316
File:
PDF, 1.94 MB
english, 2012