Control of inclination angle of glass-like carbon mold by...

Control of inclination angle of glass-like carbon mold by defocus UV exposure on Si-containing photoresist

Mekaru, Harutaka, Okuyama, Chieko, Ueno, Akihisa
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Volume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4766316
File:
PDF, 1.94 MB
english, 2012
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