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Influence of residual pressure and ion implantation on the structure, elemental composition, and properties of (TiZrAlYNb)N nitrides
Pogrebnjak, A. D., Yakushchenko, I. V., Sobol’, O. V., Beresnev, V. M., Kupchishin, A. I., Bondar, O. V., Lisovenko, M. A., Amekura, H., Kono, K., Oyoshi, K., Takeda, Y.Volume:
60
Language:
english
Journal:
Technical Physics
DOI:
10.1134/S1063784215080228
Date:
August, 2015
File:
PDF, 2.68 MB
english, 2015