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Method for preparing photoresist grating masks
Stepanov, S S, Sychugov, V A, Tulaĭkova, T VVolume:
10
Language:
english
Journal:
Soviet Journal of Quantum Electronics
DOI:
10.1070/QE1980v010n04ABEH010120
Date:
April, 1980
File:
PDF, 130 KB
english, 1980