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The role of free carrier absorption in laser annealing of silicon at 1.06μm
Nilsson, N G, Svantesson, K GVolume:
13
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/13/1/013
Date:
January, 1980
File:
PDF, 447 KB
english, 1980