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Demagnification in proximity x-ray lithography and extensibility to 25 nm by optimizing Fresnel diffraction
Vladimirsky, Yuli, Bourdillon, Antony, Vladimirsky, Olga, Jiang, Wenlong, Leonard, QuinnVolume:
32
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/32/22/102
Date:
November, 1999
File:
PDF, 751 KB
english, 1999