Interface analysis of atomic layer deposited-TiN gate...

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Interface analysis of atomic layer deposited-TiN gate electrodes on ultrathin SiO[sub 2] layers

B. Sell, A. Sänger, W. Krautschneider
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Year:
2003
Language:
english
DOI:
10.1116/1.1565341
File:
PDF, 1.06 MB
english, 2003
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