Cu-plated through-wafer vias for AlGaN∕GaN high electron...

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Cu-plated through-wafer vias for AlGaN∕GaN high electron mobility transistors on Si

K. Chen, F. Ren, A. Pais, H. Xie, B. P. Gila, S. J. Pearton, J. W. Johnson, P. Rajagopal, J. C. Roberts, E. L. Piner, K. J. Linthicum
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Year:
2009
Language:
english
DOI:
10.1116/1.3212931
File:
PDF, 900 KB
english, 2009
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