Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2014 / 03 Vol. 32; Iss. 2
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Novel high-throughput and maskless photolithography to fabricate plasmonic molecules
Bonakdar, Alireza, Jang, Sung Jun, Mohseni, HoomanVolume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4865999
Date:
March, 2014
File:
PDF, 1.15 MB
english, 2014