Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2014 / 07 Vol. 32; Iss. 4
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Effect of Al concentration on Al-doped ZnO channels fabricated by atomic-layer deposition for top-gate oxide thin-film transistor applications
Kim, Eom-Ji, Bak, Jun-Yong, Choi, Jeong-Seon, Yoon, Sung-MinVolume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4880823
Date:
July, 2014
File:
PDF, 3.20 MB
english, 2014