![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Optical Systems Design 2005 - Jena, Germany (Monday 12 September 2005)] Advances in Optical Thin Films II - Influence of the amorphous character of Al2O3 layers on their use in the deep UV spectral range
von Blanckenhagen, Bernhard, Tonova, Diana, Koslowski, Thorsten, Amra, Claude, Kaiser, Norbert, Macleod, H. AngusVolume:
5963
Year:
2005
Language:
english
DOI:
10.1117/12.625203
File:
PDF, 656 KB
english, 2005