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Epitaxial Growth on 150 mm 2° off Wafers
La Via, Francesco, Piluso, Nicolo’, Fiorenza, Patrick, Mauceri, Marco, Vecchio, Carmelo, Pecora, Antonino, Crippa, DaniloVolume:
821-823
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.821-823.157
Date:
June, 2015
File:
PDF, 350 KB
english, 2015