Substrate and coating defect planarization strategies for...

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Thin Solid Films 2015 / 4

Substrate and coating defect planarization strategies for high-laser-fluence multilayer mirrors

Stolz, Christopher J., Wolfe, Justin E., Mirkarimi, Paul B., Folta, James A., Adams, John J., Menor, Marlon G., Teslich, Nick E., Soufli, Regina, Menoni, Carmen S., Patel, Dinesh
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Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.04.047
Date:
April, 2015
File:
PDF, 1.66 MB
english, 2015
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