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Substrate and coating defect planarization strategies for high-laser-fluence multilayer mirrors
Stolz, Christopher J., Wolfe, Justin E., Mirkarimi, Paul B., Folta, James A., Adams, John J., Menor, Marlon G., Teslich, Nick E., Soufli, Regina, Menoni, Carmen S., Patel, DineshLanguage:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.04.047
Date:
April, 2015
File:
PDF, 1.66 MB
english, 2015