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[AIP APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY: 17TH International Conference on the Application of Accelerators in Research and Industry - Denton, Texas (USA) (12-16 November 2002)] AIP Conference Proceedings - Requirements and Challenges in Ion Implanters for Sub-100nm CMOS Device Fabrication
Jeong, UkyoVolume:
680
Year:
2003
Language:
english
DOI:
10.1063/1.1619810
File:
PDF, 574 KB
english, 2003