Ultrasonic fingerprint sensor using a piezoelectric micromachined ultrasonic transducer array integrated with complementary metal oxide semiconductor electronics
Lu, Y., Tang, H., Fung, S., Wang, Q., Tsai, J. M., Daneman, M., Boser, B. E., Horsley, D. A.Volume:
106
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4922915
Date:
June, 2015
File:
PDF, 2.01 MB
english, 2015