![](/img/cover-not-exists.png)
Waveguide effect during photoetching of semiconductors
Sychugov, V A, Tulaĭkova, T VVolume:
14
Language:
english
Journal:
Soviet Journal of Quantum Electronics
DOI:
10.1070/QE1984v014n03ABEH004885
Date:
March, 1984
File:
PDF, 288 KB
english, 1984