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Effects of Substrate Temperature and Nitrogen Pressure on Growth of AlN Films by Pulsed Laser Deposition
Lei, Lv, Qing-Shan, Li, Li, Li, Li-Chun, Zhang, Cai-Feng, Wang, Hong-Xia, QiVolume:
24
Language:
english
Journal:
Chinese Physics Letters
DOI:
10.1088/0256-307X/24/2/070
Date:
February, 2007
File:
PDF, 314 KB
english, 2007