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[IEEE 2015 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK) - Kyoto, Japan (2015.6.4-2015.6.5)] 2015 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK) - Evaluation of In2O3 thin film deposited by RF magnetron sputtering
Yoshioka, Toshihiro, Ogawa, Junji, Yuge, Masahiro, Matsuda, Tokiyoshi, Kimura, MutsumiYear:
2015
Language:
english
DOI:
10.1109/IMFEDK.2015.7158565
File:
PDF, 345 KB
english, 2015