[IEEE ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics - Honolulu, HI, USA (21 July-2 Aug. 2000)] ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076) - Design of a new ferroelectrics-silicon integrated microphone and microspeaker

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