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[IEEE 2015 6th IEEE International Workshop on Advances in Sensors and Interfaces (IWASI) - Gallipoli, Italy (2015.6.18-2015.6.19)] 2015 6th International Workshop on Advances in Sensors and Interfaces (IWASI) - Three dimensional ALD of TiO2 for in-vivo biomedical sensor applications
Schroder, Sven, Dogan, Ozgu, Schneidewind, Jessica, Bertotti, Gabriel, Keil, Stefan, Gargouri, Hassan, Arens, Michael, Brose, Evelin, Bruns, Jurgen, Wolansky, Dirk, Tillack, Bernd, Vassanelli, StefanoYear:
2015
Language:
english
DOI:
10.1109/IWASI.2015.7184978
File:
PDF, 1.50 MB
english, 2015