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Characterization and operation of a mechanically actuated silicon microgripper
M. M. Blideran, M. Fleischer, W. Henschel, D. P. Kern, J. Sterr, K. Schock, S. Kleindiek, M. G. Langer, K. Löffler, F. GrauvogelYear:
2006
Language:
english
DOI:
10.1116/1.2357961
File:
PDF, 732 KB
english, 2006