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SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 13 June 2005)] Optical Measurement Systems for Industrial Inspection IV - The laser-scanning confocal vibrometer microscope
Rembe, Christian, Drabenstedt, Alexander, Osten, Wolfgang, Gorecki, Christophe, Novak, Erik L.Volume:
5856
Year:
2005
Language:
english
DOI:
10.1117/12.611996
File:
PDF, 331 KB
english, 2005