Development and characterization of a time-based, mass flow...

Development and characterization of a time-based, mass flow controller

Quarini, G L, Chinarak, T, Chang, Y C
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Volume:
221
Language:
english
Journal:
Proceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering
DOI:
10.1243/09544089JPME116
Date:
January, 2007
File:
PDF, 3.56 MB
english, 2007
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