Experiment on alleviating the bending of CVD-grown heavily...

Japanese Journal of Applied Physics 2015 / 04 Vol. 54; Iss. 4S

Experiment on alleviating the bending of CVD-grown heavily Al-doped 4H-SiC epiwafer by codoping of N

Ji, Shi-yang, Kojima, Kazutoshi, Ishida, Yuuki, Saito, Shingo, Yamaguchi, Hirotaka, Yoshida, Sadafumi, Tsuchida, Hidekazu, Okumura, Hajime
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Volume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.54.04DP08
Date:
April, 2015
File:
PDF, 578 KB
english, 2015
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