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Surface structure estimation by plasma fluorination of amorphous carbon, diamond, graphite and plastic film surfaces
Kasai, H, Kogoma, M, Moriwaki, T, Okazaki, SVolume:
19
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/19/11/002
Date:
November, 1986
File:
PDF, 192 KB
english, 1986