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An instrument for contactless lifetime measurements in semiconductor layers of silicon-on-insulator (SOI) materials
Rehwald, W, Morf, R, Vonlanthen, AVolume:
6
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/6/8/003
Date:
August, 1991
File:
PDF, 591 KB
english, 1991